Surface Acoustic Wave Micro Actuators And Applications

SAW(Surface acoustic wave)has been developed from 1960s, which combines acoustics, optics, electronics and materials science and other subjects. SAW devices have been widely used in mobile communications, avionics and other fields. In 21st century, SAW devices have been acquired great development in micro fluidics, solid-driven and other applications.This paper developed micro SAW actuators with micro fabrication technology and studied their applications. The main tasks of this dissertation include the following:1. Introduced the history of surface acoustic wave, the main types of SAW devices and Micro Electro Mechanical system(MEMS). Summarized the current domestic and international development in applications of SAW actuators, such as microfluidics and solid driving.2. Described the types of bulk acoustic wave and the principle and characteristics of SAW. Analyzed the structure of IDT(inter digital transducer), the incentive principle of SAW and theδfunction model of IDT. Discussed the selection of piezoelectric substrate materials.3. Simulated the properties of micro SAW actuators with the software MATLAB and ANSYS. 4. Studied micro fabrication techniques of SAW actuators, Optimized various process parameters through experiments. Produced many SAW actuators with different size.5. Illustrated the principle of SAW propagation in micro fluidics. Studied and analyzed the three applications in micro fluidics, including micro mixing, micro fluid atomization, micro fluid driving.6. Illustrated the principle of SAW solid driving, Produced two slider platforms and realized the linear and planar solid driving of SAW actuators.Finally, the development and research of SAW actuators in future are discussed.