Fabrication And Raman Spectrum Of Carbon Nanotubes On Different Substrates

This dissertation will mainly disscuss how to fabricate carbon nanotubes(CNTs)on different substrates. We combine scanning electron microscope with Ramanspectrum to test the sample. The thesis introduces some concepts of CNT, thenresearch how to get CNTs on silicon substrate and metal (304stainless steel andcopper) substrate. We get the conclusion that when the rate of acetylene is30sccmand hydrogen is100sccm, the CNTs can be fabricated well.If the rate doubledboth,the directionality and density of the CNTs arrays are the best, the curve of thetube is the most smooth.The aspect of etching,in the condition that to use100sccmammonia gas etch10min, the CNTs arrays twine less and van der waals forcebetwween the tubes is more balanced. On the metal substrate, the experiementindicated that the the thick catalyst is not effective for fabricating CNTs.We alsodiscussed the influence of different buffer layers and get the conlusion:depositing15nm titanium on304stainless steel and5nm aluminum on copper can improve theCNTs growing on the substrates.At last, we fabricated CNTs arrays at the side of304stainless steel substrate,because the experimental data is insufficient, so we only dosome qualitative analysis.