Microstructure And Mechanical Properties Of Ti(C,N)and TiAlCN Gradient Multilayer Hard Fims

In this study, the Ti(C,N) and TiAlCN multilayer films with various C2H2flow rate and Titarget working current were deposited on high speed steel and cemented carbide substrates byArc ion plating (AIP) technique, and XRD, XPS, EDS, SEM, Nano-indentation and Scratch testwere used to systematically investigate the effect of depositing parameters on composition,phase structure, crossing-section and surface morphology, hardness, adhesion strength andtribological property of the films. And then, the conclusions were summarized as follows:1. All the CrN/TiN/Ti(C,N) films showed a highly textured growth with the (111) as thepreferred orientation along the surface normal, while random orientation in plane. As the peakvalue of C2H2flow rate increased, the preferred (111) orientation became less dominant, but it isstill an order of magnitude higher than (200) and (220).2. The CrN/TiN/Ti(C,N) films consist of four components: TiN, TiC, Ti(C,N) and sp2C-C,formed the crystalline+amorphous composite structure. In the same C2H2flow rate condition,the content of TiC and sp2C increased and dcreased, respectively, as the depth of the filmsincreased. As the C2H2flow rate increased, the TiC content decreased, the excess C preferred toform amorphous phase or exist as interstitial atom in TiN lattice.3. The H/E value of CrN/TiN/Ti(C,N) films increased with the increase in the C2H2flowrate, and high H/E ratio is important for providing better wear resistance; the TiC contentdrceased as increasing the C2H2flow rate, which leads to a decrease in hardness and frictioncoefficient,but the toughness and adhesion strength of the films increased.4. The A-C series TiN/(Ti,Al)N/TiAlCN films consist of four components:(Ti,Al)(C,N)、TiN、 Ti(C,N) and sp2C-C, which formed the crystallite+amorphous composite structure.With the increase of the peak value of C2H2flow rate, more sp2C-C formed, and the hardnessand adhesion strength showed a drcease and increase, respectively.5. The A-I series TiN/(Ti,Al)N/TiAlCN films consist of four components:(Ti,Al)(C,N)、TiN、 Ti(C,N) and sp2C-C, which formed the crystallite+amorphous composite structure.With the increase of Ti targe working current, both adhesion strength and hardness of the filmsincreased.