| The efficiency of thin film solar cells could be improved by choosing texturedtransparent conductive thin film as the front electrode. In this paper, textured tin oxide thinfilms were deposited on quartz glass substrates by spray pyrolysis technique. The changerules of haze, along with the relations between haze, corresponding structure, morphologyproperties and deposition conditions were discussed by researching on the factors ofsubstrate temperature, number of layers, concentration of SnCl4and the solvent ratio ofwater and propan-2-ol. The structure, surface and cross-section morphology and roughnesswere investigated by XRD, FESEM and AFM. The haze value, transmittance and sheetresistance were studied with haze meter, UV-Vis spectrophotometer and four-point probemethod.XRD results revealed that all the films consisted of polycrystalline cassiteritetetragonal crystal structure and exhibited obviously preferred (200) orientation. Thedegree of preferred orientation was observed to present the trend that increased firstly thendecreased with increasing temperature, and that increased gradually with the increase oflayers, concentration and the amount of propan-2-ol. The haze value was improved withthe increase of texture coefficient of (200) plane.The morphology was affected by varying the preparing conditions. The thickness,particle size and roughness were observed to present the trend that increased firstly thendecreased with increasing temperature, and that increased gradually with the increase oflayers, concentration and the relative amount of propan-2-ol. The haze value wasimproved with the increase of thickness, particle size and roughness of SnO2thin films.The increase of the degree of (200) orientation, particle size, thickness and especiallyroughness of SnO2films contributed to the improvement of haze value. When haze,transparency and conductivity of SnO2thin films were taken into account, the optimaldeposition conditions were530~580℃,20~30layers,0.8~1mol/L and7P2W~8P1W. |
PDF Full Text Request