Preparation Of FTO Thin Films By USP Technology And Investigation Of The Haze Modulation

In this paper, the fluorine-doped tin oxide(FTO) thin films were deposited on heated glass substrates by ultrasonic spray pyrolysis(USP), with Monobutyl Tintrichloride(MBTC) and ammonium fluoride as the precursors and the doping agent, respectively. The effects of substrate temperature, spraying time, MBTC concentration on the microstructure and photoelectric performance of FTO thin film were researched and discussed. XRD was used to measure and analyze structural features of thin film; FESEM was used to observe surface morphology of the film, AFM was used to observe the fluctuation and three-dimensional morphology of surface particles, Ultraviolet-visible spectrophotometer and sheet resistance meter were used to measure mean transmission and square resistance in the scope of visible light, respectively. Figure of merit was referenced as the comprehensive assessment about the photoelectric properties; Haze meter was used to measure haze value of films. The change rules of film haze with thin film structure and surface morphology would be discussed.The experimental results show that FTO films prepared under different conditions were polycrystalline tetragonal rutile structure SnO2. A texture transition from(200) to(301) crystallographic orientation were exhibited with substrate temperature increasing film thickness, surface particle size and surface roughness values increased and then decreased with the increase of substrate temperature and MBTC concentration, and increased constantly with the increase of spraying time. When the thin film thickness, surface particle size and surface roughness values reached 1480 nm, 539 nm and 54.98 nm, respectively, the haze value got the maximum at 36.79%.Considering the transparency, conductivity and haze value of FTO film, the optimal deposition conditions were 530°C, 5 min and 1.5 mol%, the figure of merit and haze value were 21.8×10-3 Ω-1 and 12.66%, respectively.