Preparation Of FTO-CNTs Hybrid Thin Films By SPD And Investigation Of Photoelectric Properties

F-doped tin oxide film?FTO?can be used as a low resistivity suede transparent conductive oxide thin film battery electrode material,can improve the solar cell photoelectric conversion efficiency.In this paper,FTO-CNTs transparent conductive thin films were prepared by spray pyrolysis?SPD?,using monobutyltin trichloride?MBTC?and ammonium fluoride as precursors and carbon nanotubes?CNTs?.The effects of substrate temperature,CNTs concentration and spray time on the structure,morphology and photoelectric properties of the films were investigated.The structure and grain size of the films were characterized by X-ray diffractometer.The surface morphology of the films was characterized by field emission scanning electron microscopy?SEM?.The UV-spectrophotometer was used to characterize the CNTs failure temperature Probe resistance meter and haze meter to characterize the optoelectronic properties of the film and give the comprehensive judgment.The main findings are as follows:Addition of CNTs to the film could reduce the resistivity of the film.Considering the film resistivity,the average transmittance and the haze,the substrate temperature is 520?,the CNTs concentration is 0.03 g/L,and the spray time is 5 min,the film resistivity is 3.22x10^-4 ? · cm,an average transmittance of 74.6% and a haze of 22.86%.The FTO-CNTs hybrid thin films prepared under different deposition conditions was polycrystal tetragonal rutile structure.With the substrate temperature increasing and the spraying time prolonging,the grain morphology of the film gradually changed.The film thickness is increasing,the rate is decreasing,the haze of the film is increasing and the transmittance is decreasing.With the increase of CNTs concentration,the resistivity of the films decreased first and then increased.