| The thin film solar cell is based on its low cost. Usually, it’s produced by the roll-to-roll manufacturing or coating on the flexible substrate. The thin film solar has more advantages than the crystalline silicon solar cell. Firstly, it can save the semiconductor material mostly. Secondly, it makes the process simply. Thirdly, it has light quality and high efficiency. Also, it’s flexible to carry and save space.In this paper, it prepares the ZAO film by magnetron sputtering on the flexible substrates. It searchs the optimal technology by changing the condiction of the sputtering power, working pressure, sputtering time and the substrate temperature. Then, observe the surface appearance by the scanning electron microscopic. Test the translucency of ZAO by the ultraviolet spectrophotometer. Measure the sheet resistance by the multimeter.Through many experiments, the optimal technology is founded out. When the sputtering power is100W, the working pressure is1.5Pa, the sputtering time is60min and the substrate temperature is125℃, the ZAO film has the best properties. In this condition, the sheet resistance is510Q, the translucency is above90%and the surface appearance of the ZAO film is well. What’s more, it has no wrinkle or crimp on its surface. |
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