The Fundamental Research Of Machining Mechanism And Experiment In Ultrasonic Disturbed Electrolyte Micro-electrochemical Machining

With the rapid development of advanced manufacturing tenologies, more and moremetal micro structures appeared in fields of microelectronics, aerospace, precisioninstruments and precision moulds. There were many difficulties in the traditional micromachining technologies, such as high wear of tools and thermal deformation ofworkpieces. Comparatively, the micro-electrochemical machining (Micro-ECM)technology was one of effective methods to solve the technical problems above. As anon-traditional machining method, the aim of micro-ECM was to get micro-size, highprecision micro structures by using electrochemical dissolution process. In recent years itwas focused on with the development of micro machining technologies.To improve the machining accuracy of micro structures in micro-ECM, theimportant problem was to improve the precision of workpiece’s local dissolution. Whilethe crucial factor that effect the local dissolution was the distribution of the inter-electrodegap.In the thesis in order to get high machining accuracy and machining velocity ofworkpieces, the ultrasonic vibration was used to disturb the electrolyte in theinter-electrode gap. And based on the theories of ultrasonic vibration, the mechanism ofultrasound-disturbed electrolyte was studied. The distribution of flow parameters wasinvestigated in detail in the paper.With the aid of the COMSOL Mutiphysics software the distributions of electric field,flow fluid and ultrasound field were analysed and simulated. The results had shown thatthe cavitation existed in the inter-electrode gap when the electrolyte was disturbed byultrasound. Then distributions of flow fluid parameters were analysed and comparedrespectively. The simulations and comparisons supplied theoretical basis for the followingexperiments.In the thesis a special fixture was designed to realize ultrasonic disturbed electrolytemicro-ECM. Taking micro holes with size of a few hundred microns for machiningexamples, a serial of experiments had been carried on the digital EMM machine. Results had indicated that the precision of workpiece’s local dissolution was improved greatly.Furthermore the machining accuracy and machining velocity were improved.The research had provided a new technical approach to improve the machiningaccuracy of micro-ECM. It was verified that the analysis were to be used in the deeperstudy.