The Research On Production Logistics Controlling Methods In Semiconductor Manufacturing

The development level of semiconductor industry is an important indicator of a country's modern economy and hi-tech, and also a big engine for the development of economy and technology. So every government of the world pay great importance to this industry. With the reform and opening-up of China, our semiconductor industry has been developed form nothing to small, from small to strong. And a lot of famous semiconductor companies come up, forming the production base of Yangzi River Delta Region, Jing-Jin-Ji Bohai Sea Rim region and Pearl River Delta. And the yields of IC grow every year.With the development of semiconductor manufacturing technology, the most common wafer size has enlarged form 200mm to 300mm, the process version has shrink from 0.18μm to 90nm and even smaller. The development of semiconductor manufacturing technology need the production logistics system to be updated, using Automated Material Handling System(AMHS) gradually, raising the level of production logistics, optimizing the logistics dispatch and raising the level of material traceability to meet the needs of 300mm semiconductor manufacturing requirements.The research object of this paper is the production logistics system of 300mm wafer fabrication. Based on the analysis of character of production logistics and content of production logistics controlling, this paper forms the production logistics controlling structure of wafer fabrication. This paper expands focusing on the controlling structure, and includes the following research:1) Introduced the definition, component, layout and benefit of AMHS in wafer fabrication.2) Researched on production logistics system controlling methods. Based on the current research on interbay and intrabay controlling methods, this paper focused on the rule controlling methods. Through introduce the customer satisfaction factor to the intrabay controlling rules, this paper formed the corresponding dispatch methods.3) Researched on WIP tracking methods in wafer fabrication. Put forward the Definition of material's three dimensions based on the analysis of key tracking factors. Linked the tracking theory to wafer fabrication, got the tracking factors of semiconductor WIP, designed the coding ID for these factors and finally put forward the tracking model in wafer fabrication. 4) Researched on the supporting technology for production logistics system controlling in wafer fabrication. Introduced the data collecting and material identification skills and designed the system structure for application.