The Research On Micro-assembly Technology Of Mems Fuse

With the miniaturization and micromation of MEMS products, micro-assembly technology play an increasingly important role in micro-electromechanical systems (MEMS). To make the MEMS fuze components can be accurate and reliable assembly together, it need to build a set of micro-assembly systems for MEMS fuze. Because of MEMS fuze components for the small, thin, brittle and so on, micro-assembly system scheme of MEMS fuze is designed with the gear, gear shaft, balanced pendulum, balancing pendulum axis of the fuze MEMS-based S&A device as assembly object. At the same time , the critical components of the micro-assembly system are also designed and experimented.A micro displacement worktable is designed based on two-way planar four-bar linkage of flexure hinge, which is actuated by piezoelectricity ceramic actuator(PZT). It is analyzed motion and is modeled with Pro/E. ANSYS is used to analyze static and modal state and the analytical results are in good agreement with computing results. It proves that the structure of worktable is basic feasible. The structure of vacuum adsorption worktable which adsorb different parts and the loop of vacuum are designed. A micro-gripper is designed based on flexure hinge with two grades amplifier, driven by PZT. It is modeled with Pro/E and is analyzed static state and simulation calculation and modal state with ANSYS. At last, the micro displacement worktable and the micro-gripper are manufactured and tested. The experimental results shows that the worktable can achieve 0 ~ 10um travel to the X and Y direction and comply with the design requirements. The micro-gripper can realize close and open with raise or lower voltage. The maximal displacement is 245um and the actual magnification is about 12.2. The actual magnification is less than the magnification of the theory design and the finite element simulation calculation. This results are analyzed and summarized. While the micro-gripper magnification is relatively low, but it can clamp the parts of the fuze MEMS-based S&A device, so the structure of micro-gripper is basic feasible.This research work provide a foundation for building a set of micro-assembly systems for MEMS fuze, at the same time, it also has certain reference significance to construct the other micro-assembly systems.