Nano Titania-doped Films And Performance

In this paper, we put forward some revising supposition of preparing for TiO₂-XN_X film with doped N and on the basis of former we adopt method of doped rare earth Y to improve the photocatalyze capacity and photocatalyst capacity of TiO₂ films aiming at some existing problems in the domain of TiO₂ films photocatalyze.In this paper, the method of multi-arc ion plating arc is introduced to prepare for pure TiO₂ films and firstly prepared doped TiO₂ film. With pure Ti target, TiO₂ film can be deposited in the Ar/O₂ atmosphere and TiO₂-xN_x film can be deposited in the N₂/O₂ atmosphere; with TiY alloy target, the TiO₂ film doped N and Y can be deposited in the N₂/O₂ atmosphere. Then the crystal structure of the pure TiO₂ film the TiO₂-x N_x film and the TiO₂ film doped N and Y are analyzed by X-ray Diffraction(XRD); the structure of films are observed by Atom Force Microscope(AFM) and Scan Electron Microscope (SEM) ; the absorptivity and the transmission rate of he pure TiO₂ film and the doped T1O2 film are tested with UV-VIS photometer.The experiment shows that the crystal structure of the pure TiO₂ film and the TiO₂-xN_x film with the heat treatment under 500℃ temperature are anatase model. The preparation of TiO₂ film assisted with ion beam current have preferable photocatalysis and higher light transmissivity.The TiO₂-xN_x film have little enhance on photocatalysis and the optical absorption capability is lower than pure TiO₂ in ultraviolet light.We firstly find that the TiO₂ film doped N, Y prepared with no ion beam current assistance deposition have more preferable photocatalysis than the pure TiO₂ film and the TiO₂-xN_x film. On the contrary the photocatalysis of the TiO₂ film doped N, Y prepared with ion beam current assistance deposition have been reduced. At the same time we find that the absorbing peaks obviously shift to the long wave occur in doped film with no ion beam current.