Light - Acid In The Polymer Film And Production Of Acid Evaluation And Application

To study on evaluation acid generation efficiency of photoacid generator in thin polymer film, this reseach set up a method to quantificationally test the quantum efficiency of acid-generation and decomposition. Vis-uv photometry and florescence photometry were employed to evaluation acid generation efficiency. The result of florescence photometry showed perfect,comparing two evaluation methods.The structures of PAGs tested are sulfonium series and triazine series.This paper studied the thermal stability and photolysis of photoacid generators.The result indicated that PAG kept thermal stability at 100℃,and PAGs would decompose on 3400Lux of whole spectrum,while they would decompose on 6.0×10-3W/cm2 of 365nm and 405nm monochromatic light.Vis-uv photometry was employed to evaluate acid generation efficiency of photoacid generator. Rhodamine B (RB) and Crystal Violet Lactone(CVL) were chose as acid sensors. The property of RB and CVL was examined in acids, including uv-vis absorbency. The result indicated that RB was the perfect acid sensor. The standard working curves in thin polymer film were set up, which indicated the relationship of acid concentration and Rhodamine B's relative peak absorption. The standard working curves of HCl and TfOH were set up.Florescence photometry was employed to evaluate acid generation efficiency of photoacid generator. Chose Florescein and Rhodamine B as fluorescent dyes, and the both capabiity were compared. The result indicated that both Florescein and Rhodamine B could reflect the different amounts of acid generated,but Rhodamine B was the perfect acid sensor. A method of florescence photometry was established, Rhodamine B (RB) as acid sensor. The standard working curves of HCl and TfOH were set up.Acid production quantum efficiency evaluation formula was pushed out. According to the formula and the standard work curves, acid production quantum efficiency of PAGs can be calculated. Thus, it could be used to value PAGs. The result indicated diethylic triazine was one of high efficiency photoacid generators. Florescence photometry showed sensitive and accurate, comparing of this two evaluation methods.The imaging system was set up with acid sensitive phenolic resin,cross-linking agent(w/w % 3:1) and photoacid generator. And the application of PAG in imaging system was studied by exposing and developing. The result indicated that on the condition of exposing for 30s with 6.0×10-3W/cm2 of 365nm, baking for 10min at 130℃and developing in 0.5%NaOH, the high efficiency and good optical imaging effects of PAGs were screened, comparing of differences of imaging effects.