Preparation Of Si-doped Dlc Films, Structure And Optical Properties

Hydrogen-free diamond-like films and silicon incorporated diamond-like carbon films were deposited by direct current magnetron sputtering with Ar gas, graphite and silicon chips on the single-crystal silicon and optical glass substrates. Influence of different silicon concentration on optical properties, surface morphology, microstructure and electronic structure of DLC films were investigated by UV/VIS transmittance spectrometer, atomic force microscope(AFM), atomic fluorescence spectrometer(AFS), X-ray photoelectron spectroscopic (XPS), X-ray diffraction, raman microscope respectively, and inspected the transmittance, the optical band gap, the roughness of surface. We studied that how the different substrates and various conditions influenced the properties of films in order to deposit the best films on the better conditions. We found more details on influence of different silicon concentration on films.The results show that hydrogen-free diamond-like films and silicon incorporated diamond-like carbon films were deposited by direct current magnetron sputtering with Ar gas graphite and silicon chips. The transmittance ratio in visible and infrared distracts increases quickly when the silicon contained DLC films. The optical band gap of films firstly increased then decreased with silicon content increasing. The photoluminescence measurement reveals that the light emission centre "blue" shift and the intensity enhanced. XRD and AFM show that the films are amorphous with the atom of carbon and silicon interacting. XPS analyses reveal that the silicon concentration increased from 6.35at.% to 24.55at.% with the silicon area enhancing. We concluded that addition of silicon into the films leads to an increase in the sp~3/sp~2 ratio from different bond. The D and G modes of their Raman spectroscopy of the silicon incorporated diamond-like carbon move to higher energy.At last we discussed details that deposition parameters influenced on the deposition rate, the surface morphology, the transmittance ratio in visible and infrared distracts and the optical band gap, meanwhile the theories of the DLC growth were investigated.