Preparation And Properties Of Diamond-like Carbon Films Deposited By High Power Pulse Magnetron Sputtering

Diamond-like carbon(DLC)coating is a metastable amorphous carbon that combines high hardness,high wear resistance,high thermal conductivity,good biocompatibility and low friction coefficient.DLC coating are widely used in machinery,electronics,optics,aerospace and other fields.The deposition process of DLC coating is mainly the formation of sp3 C-C bonding Improving the ionization rate of the carbon ion beam is the key to obtain a high sp3 bonding content.High power impulse magnetron sputtering(HiPIMS)is a new physical vapor deposition technology with high energy density and high ionization rate.Neon(Ne)has a high ionization energy to increase energy electrons and help to ionize carbon atoms.Therefore,this article will use Ne mixed traditional sputtering gas argon(Ar),with high power pulsed magnetron sputtering HIPIMS technology(Ne-based HiPIMS)to prepare DLC coating.The effects of Ne fraction,working pressure and HiPIMS power supply parameters on the structure morphology,carbon structure,residual stress,mechanical properties and tribological properties of DLC coating were systematically studied.The main conclusions are as follows:(1)Using HiPIMS technology to prepare DLC coating,systematically study the effect of Ne fraction on the structure and performance of DLC coating The results show that the as-deposited DLC coating exhibits a graphite-like composite DLC structure.With the increase of Ne fraction,the number and size of particles on the surface of the DLC coating gradually decrease,the sp3 bonding content in the coating increases,and the stress and the hardness gradually increases as well.As Ne fraction is increased to the highest 75%,the hardness of DLC coating increases to 30.5GPa.At room temperature,the graphite-like particle composite DLC coating exhibits excellent tribological properties,with high wear resistance and low friction coefficient,the minimum friction coefficient can reach 0.08(2)The effects of working pressure and HiPIMS power supply parameters on the structure and performance of DLC coating were studied.The results have shown that as the working pressure increases,the graphite-like particles on the surface of the DLC coating first increase and then decrease,and the sp3 bonding content,stress,and hardness in the coating also increase first and then decrease.Compared with the adjustment of the working pressure,by adjusting the HiPIMS power supply parameters(average power,pulse width),the target current of HiPIMS and the mechanical properties of the DLC coating are further improved.The DLC coating was prepared by changing the average power of HiPIMS,with the increase of the average power,the graphite-like particles on the surface of the DLC coating gradually increased When the average power increased to 3kW,the target current increased to 189A,and the coating hardness increased to 32.1GPa.The DLC coating is prepared by adjusting the HiPIMS pulse width.The graphite-like particles on the DLC coating surface increase with the pulse width.When the pulse width is 10 ?s,the target current reaches the highest 239A,and the prepared DLC coating also Reached the largest 34.2GPa.Regardless of changing the working pressure or changing the power parameters of HiPIMS,the overall DLC produced is maintained at about 0.11,with a minimum of 0.09.It has the characteristics of high hardness,low friction coefficient and high wear resistance.