High-resolution Elastic Recoil Detection Analysis (erda) Technology

Elastic recoil detection technique with high depth resolution has been developed at the HI-13 tandem accelerator of CIAE. With high quality beam which was used for bombarding target, the recoils were detected with Q3D magnetic spectrometer following a focal plane detector and a AE-E telescope detector with longitudinal double-room ionization chamber. The measured spectra were transformed to the concentration profiling of the recoil atoms by using the knowledge of the Rutherford cross section and the stopping power of the projectile and the recoils in the materials.A depth resolution of nano-meter level was achieved to light elements such as C and H with the Q3D spectrometer system. The depth profiling of the elements from light to medium could be simultaneously obtained by the AE-E telescope detector with a depth resolution about 20~30 nm. we analysis some samples such as new semi-conductor GaAs, new photoelectric material GaN et al., and get these depth spectrums. This device can also be used as a monitor in ERDA with Q3D magnetic spectrometer to achieve higher energy resolution about Inm.Especially, a AE(gas)-E(solid) telescope with longitude double-room ionization chamber is made. By double-room technology, a higher energy resolution of the longitude ionization chamber was achieved. Energy resolutions of 3.3% for the AE detector and 1.5% for Er detector are obtained by the in-beam test with the elastic scattered 12C from 197Au at the energy of 50.3 MeV. It can be used in ERDA(elastic recoil detector analysis) and other nuclear physics experiment.