Flat Electret Micro-motor And Simulation

Micro Electro-mechanical System(MEMS) refers to a kind of microapparatus or microsystem which combine microstructures, microsensors, microactuators as well as corresponding signal disposal control circuits into a whole. It is the product of combination of varied disciplines including machine, material, information and autocontrol and so on. Usually, electrostatic motors are employed as micro-mechanical dynamical components in microactuators. Electrostatic motors take charge in changing electrical signal into mechanical movement. As a result, the bulk and function of them will make direct influence on the whole performance of MEMS.In this paper, we first introduced the latest research trends of MEMS and electrostatic motor in both domestic and overseas. Then, we introduced the fundamental theory of MEMS and especially made emphasis on the introduction of Micro-mechanism manufacture technology. We put forward the compressed electret micromotor model by improving the structure of classical electret motor. Compared with classical electret motor, compressed electret micromotor has some particular superiorities. While the compressed electret micromotor adopt top-drive structure, the output torque of it is larger than that of side-drive structure. The operating principle of the compressed electret micromotor is the variable capacitance. The attenuation time constant of the charges on rotor surface is much longer than the shaping time of electret itself while the rotor is made of electret. In this paper, we established a model of compressed electret micromotor and analysed the electrostatic force between stator and rotor based on the electrostatics principle. And meanwhile, we worked out the theoretical calculation formula of output torque of single-stator Micro-electrostatic motor series. We designed the double-stator compressed electret micromotor successfully and conducted the calculation formula of output torque of 2pole-2pole compressed electret micromotor. What's more, We realized the FEA(Finite Element Analysis) of electrostatic-field between stator and rotor of double-stator compressed electret micromotor with the aid of ANSYS and its APDL language. We got the rotary drive force of rotor in electrostatic-field and compared it with the one in theoretically. They are consistent with each other by the large. In the end, we discussed the probabilities and superiorities of double-stator compressed electret micromotor as electret micro-pump by comparing it with magnetic pump. We also studied the application of compressed electret micromotor as microchipcooling fan.We believe compressed electret micromotor is better microactuators in the future. It can be applied in various fields such as aviation, spaceflight, military and medicine and so on.