| Micro power is one of the most important research directions in MEMS technology area. It is the hotspot among every country research in the world. This paper aims at solving the necessaries on planted equipments, distributing systems, no-line communication, traffics, aviation and spaceflight, battleground spying, dextrous bomb, and so on. With the support of the Chinese"863"MEMS special item, we study in theory a without day micro power, which can convert environmental energy to electricity. This possesses very significant theory meaning and imperious demanding context.This paper analyzes micro power's developing status, and especially parallels each micro vibration generator of electromagnetism, static, piezoelectricity etc. According to static induction principle and electret capability of storing charge, we put forward methods for micro vibration generator research. After studying the related theory and fabribation method, the experimental samples are been manufactured. This paper's main works are as following:1,Analyzing related basic theory of MEMS vibration generator system. We analyze two different type generator's whole structure and word principle. These are based on plane difference capacitance and changed capacitance. We establish system model, and do some relevant simulation.2,Studying micro electret's machining technology. According to charging principle of electret film, and influence of heat treat, we explore, and after many experiments on electret film, analyze superficial voltage and stability to get the best charging conditions.3,Studying other key machining technology for micro vibration generator, including micro generator's preparation technics and encapsulation technology, which is based on SiO2/Si3N4 double layer electret.4,Fabricating experimental sample of MEMS vibration generator system respectively with SiO2/Si3N4 electret and organic electret, and making the testing of MEMS vibration generator. Then making some testing analysis. |
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