| The automatic test of Corner Cube Reflector (CCR), Roof Prism and Right-angle Prism is achieved by calculating the wavefront got from the digital phase-shifting interferometer. In the paper, the theory of the digital phase-shifting interferometer is analyzed in details. Based on the characteristics of the three prisms, a mathematical model for the angle error is built and the formulas of the prisms' angel error tested by interferometer is presented. A program to test the three prisms is written. By doing lots of experiments and comparing the experimental results of PSI interferometer with those of ZYGO interferometer, the program of CCR test is proved that the precision of the dihedral angel error is less than 0. 5 second. |
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