High-performance Optical System Set-center Study

By the research of 100nm projection lithography objective lenses in 193nm(ArF)step and scan lithography equipment,the article discusses the question that is how to confirm the center of objective lenses in the high performance optical system.Firstly, the article introduces the definition of error of lens center in the old and new national standard, and summarizes three present systems that can confirm the lens center. Then we discuss the theory and formula of self-collimation catoptric method. On the basis of self-collimation theory, some apparatuses were designed (including internal-focusing center scope and center error measure instrument etc). According to application of self-collimation theory and corresponding instruments, the article emphasizes three typical assembly theory and center error results of high performance optical systems . Finally, we discuss the appraisal method and its application of super fiducial axis in assembly of lens.In the article, the method to improve center precision of high performance optical system is put forward. Meanwhile, we design the new-style super-high precision center error measure instrument, and this instrument may provide technical guarantee for the assembly of 100nm step and scan projection lithography objective lenses.