Heavy-ion Micro-beam Irradiation Device Developed

The heavy-ion micro beam radiation facility can limit the heavy-ion accelerator beam, which size is about few mm of diameter, to few μm, using aperture or focused technique. Also, this facility can aim the micro beam to special point of a sample, namely, can accurately target at a specified location on the sample.Since 1992, a lot of research works to evaluate the radiation effect have been carried out on HI-13 Tandem Accelerator using traditional broad beam to simulate the space radiation, and many achievements have been acquired. However, there is no research on mechanism of single event effect (SEE). A suitable heavy ion micro beam radiation facility is not available in our country while the needs become more and more urgent. Therefore, to build a heavy ion micro beam radiation facility on HI-13 Tandem Accelerator is on the time table. It will make CIAE to be a SEE research base with the best conditions in our country. It may support new techniques platform for the SEE mechanism research. This will contribute so much to our country' s semiconductor industry.The first aperture heavy ion micro beam radiation facility in China has been constructed at CIAE after three years efforts. The facility has been tested with 48 MeV 32S beam. A rectangular beam spot less than 2. 7X4. lμm2 has been achieved by using a rectangular pinhole aperture. The placement accuracy of the beam spot can reach to 0. 4μm. As a result, a charge collection of a diode experiment has been performed using this facility. The preliminary results demonstrate the capability of the facility for SEE research. It is believed that with enough financial aid and further improvements, this facility will play the significant role on SEE research in our country.The facility is introduced in detail in this thesis. The precision stagestest and their improvement are main part in the beginning of our works. The ion beam testing methods for the facility are also discussed. From my thesis, the reader could judge the level our facility reached now. Finally, to demonstrate the capabilities of the facility, an application case for the charge collection for a diode is shown at end of this thesis.For the understanding purpose, the whole construction procedures and the consideration at that time are also introduced. These were really hard works. My contribution is part of them. I had been participated the whole construction including testing for the precision stages, responsible to build and test the computer control system, and in charge of the chemical erosion of PET foil after experiment, and handling of the facility during the experiment.The main contents in experiment part in this thesis are the most recent experiments results. I was responsible to design the experiment, design and construction of the sample and chip carrier. Dr. Guo Gang was in charge the diode charge collection experiment.