High G Values ​​of Silicon Micro-accelerometer Structure Design And Analysis

The structure design of micro silicon high g accelerometer belongs to the study field of modern micro electromechnic design theory. It's one main part of National Defense Arming Pre-researching Project-high g accelerometer used in fuze.In the dissertation, series types of accelerometer are compared and capacitance accelerometer which can be used in a heavy shock environment is chosed to be studied. Its principle and mathmatics modal are discussed.After the accelerometer's theory is expounded, a wrest capacitance accelerometer is design according to the requirement. Structure parameters are studied and the ones which have a strange effect on the accelerometer's performance are found, such as the length and width of the bearing axis.Finite element method is used to simulate the high g accelerometer's behavior, both static and dynamic, to validate the structure's ability of surviving under over loading, lay out the distributing of stress, calculate the frequency and lay out the response to a heavy shock. Besides, ANSYS is used to canculate the squeeze film damping.According to the results, it is found that in the wrest capacitance accelerometer squeeze film is very small and can be ignored.After the structure is confirmed, professional sofeware MEMS Pro4.0 is used to design the marks and constitute the fabrication process which adapts to the high g accelerometer. The fabricated accelerometers are tested and the correct data is got which validates the structure's ability of surviving under over loading ulteriorly.The test result shows that the designed and fabricated accelerometer reaches the requrirment of the environment in fuze. Through the accelerometer's design and analysis, the steps and method of designing micro-silicon structure is acquired which is useful for applying micro-slicon strcture to fuze safety and arming system.