Silicon Micro-gyro Frequency Modulation Drive And Temperature Compensation Technology

Micro-Electro-Mechanical-System technology flourishes in recent years. It has smaller package, lower cost than macro systems available, provides high performance in the harsh environment and can be widely used in the automatic control systems such as vehicle drawing system, ESP, video stabilizing system and aero craft stabilizing system, etc.The errors which are caused by capacitive coupling and temperature will influence on the performance of micro silicon mechanical gyroscope severely. In order to improve the performance, there are many researchers home and abroad to research on these two problems. This thesis aims at the errors caused by capacitive coupling and temperature. The details are as follows:First of all, the structure and principle of gyroscope are researched on, and then the gyroscope's vibration and the mechanism of electrostatic drive and sensitivity are analyzed. On this basis, the researching on the errors of drive vibration, sensitive vibration and mechanical sensitivity respectively lays a foundation for the research on capacitive coupling and temperature errors.Secondly, this paper researches the capacitive coupling error and its affection, designs a drive circuit based on frequency modulating, analyzes the circuit directed at its characteristic and verifies in the experiment.Thirdly, it researches on frequency and damping errors caused by temperature error. In this foundation, it makes analysis on the errors of drive vibration, sensitive vibration, mechanical sensitivity, stable time, bandwidth and Q, respectively; the errors are introduced by temperature error. According to the analysis, it implements some simulation and experiments and analyzes the Brownian Noise.In the end, a thermal compensation circuit based on temperature sensor is given and carried out. The result of experiment indicates that the thermal compensation circuit could reduce the thermal error and enhance the performance. Since the accuracy of the compensation circuit is medium and the output of gyroscope drifts by itself, there are some errors exits in the compensation circuit. The errors of compensation circuit equal to about 1K...