Research On Control Strategy Of Silicon Transfer Transmitter

Integrated circuit technology is the foundation of electronic information industry, the performance of integrated circuit manufacturing equipment plays a very important role to improve the development of electronic information industry. For the integrated manufacturing equipment, wafer transfer manipulator is one of the key equipment of manufacturing equipment, performance of the manipulator will be a direct impact of integrated circuit manufacturing system production efficiency and quality. Therefore, study the wafer transfer manipulator is a great significance. According to the movement of the wafer handling robot high speed, stable characteristics, this paper carried out the research on control strategy.In this paper, the R-θ type manipulator designed control strategy, and base of the theory to build a simulation of the design of the control algorithm and the whole control system. Finally, the experimental prototype of wafer handling robot, control program of the manipulator performance is proved.First,we had selected the manipulator R-θ theta structure, and the R-θ theta series three link manipulator model analysis, the establishment of the manipulator kinematics equation. The establishment of mathematical model of the manipulator system, using id=0 as the vector control strategy.Then the acceleration of the trajectory planning method of isosceles trapezoid function through the theoretical analysis, there may be interference process design the corresponding control strategy to suppress the movement of the manipulator, the design of the whole control strategy. In order to wafer transfer Manipulator Simulation Model is more close to the actual model, a joint simulation entity model of ADAMS and Matlab, and the simulation results verified the rationality of the control strategy proposed in this paper.Finally, the control system hardware platform to build, build the robot control software architecture, the sampling control system is designed, the control algorithm and procedure. After the tests, both in high speed, the manipulator motion process, stable process can meet the design requirements of the position error. The repeatability of the test of the manipulator, the test results can be seen, the repeatability standard.