| Micro Machine can work in narrow space without disturbing the work environment and objects, so it has broad application potential in engineering field, and has drawn worldwide attention. Micro fabrication technology has become a main trend of modern processing technology.At present micro machine and micro fabrication technology developed fast. But various microscopic theory is still at the stage of exploration research, and complete microscopic theory system has not been fully set up, micro machine and micro fabrication technology research still mainly rely on experience and repeated-study. And it has an important influence on the further development of the micro fabrication techniques.This paper takes the partitioning method to study the three-dimensional surface roughness of micro EDM. It puts forward the corresponding parameters, and establishes the evaluation system of micro EDM surface roughness, providing theoretical basis for evaluating the 3D surfaces roughness of micro EDM. Then it gives the surface morphology of micro EDM evaluation area and partitioning evaluation area, and their mean and variance are calculated. Last the normal distribution inspection, uniform distribution inspection and exponential distribution inspection are carried on evaluation area and partitioning evaluation area, surface roughness between the partitioning evaluation areas are inspected and Friedman inspection and Kendall inspection of non-parameter inspection method are applied too, providing a new idea for micro EDM 3D surface roughness research. |
