The Application Research Of ECDM In The Micromachining

Due to the features of super-hard, wear-resistant, high resistivity and good thermal conductivity,the glass, ceramics and other brittle non-conductive materials are widely used in MEMS.Electrochemical discharge machining (ECDM) is an unconventional technology which can removethe workpiece material without the contact of machining tool and the workpiece, and there is nomacroscopic cutting force in ECDM. Therefore, the high surface quality can be revived when thebrittle non-conductive materials are machined by ECDM. In this paper, the processing mechanism ofECDM is studied, and the feasibility of machining brittle non-conductive material with ECDM isanalyzed through the microstructure machining experiment. The main contents are as follows:(1) The principles and characteristics of ECDM are introduced, and the basis experiments andmilling experiments are designed based on the mechanism of ECDM.(2) Experimental platform is designed for the experiments, including the connection anddebugging of the work table, the design of control system and the programming of control software,the design and production of electrode and workpiece fixture are done, and so on.(3) The drilling experiments are designed for the different machining voltage, working fluidconcentration and tool materials. The brittle non-conductive material removal mechanism isresearched through the analysis of the drilling results. The impact rules of the machining voltage, theconcentration of the working fluid and the tool material on the machining quality and efficiency arereceived by the analysis of the drilling results under different conditions.(4) The feasibility of machine brittle non-conductive material with ECDM is analyzed throughthe glass milling and cutting experiments. The preliminary experimental of machining ceramics andsilicon with ECDM is made.