Research On The Kinematic Characteristics Of Aerostatic Bearing Stage Of High Speed Precision Linear Driver

The closed aerostatic guideway taking gas as the lubricant, with high loading capacity, high stiffness, no friction, high speed, high precision, and pollution-free advantages, it is applied to precision machinery widely. The direct drive technology lead the force direct role in final positioning device, canceled the drivingmedium between source power and table, it can greatly increase the processing efficiency and machining accuracy. Aerostatic bearing stage match with linear motor drive directly greatly improve the machine processing ability, adapted to the high precision and high speed machine tool development needs, as a hot issue in high precision and high speed technology.For linear driving of the high speed precision aerostatic bearing stage require a high position precision, the larger speed, and stable operation. Floating guide and motion control performance as the key factors is effect the positioning performance, speed acceleration motion characteristics and stability of aerostatic bearing stage. Floating guide as a key component of aerostatic bearing stage system, its carrying capacity, stiffness, stability and guide rail structure, such as orifice diameter, throttle device distribution, gas membrane thickness, and so closely related; Floating platform using the linear motor drive directly, and the control methods and control the parameter selection affects aerostatic bearing stage the precision of the system. Therefore, this paper research the linear driver type aerostatic bearing stage system from the closed aerostatic guideway technology, linear motor motion control technology. The mainly study as followed:1、According to the gas lubrication theory, research the static performance of aerostatic guideway under different orifice diameter and gas membrane thickness with theoretical analysis method. Based on ANSYS finite element analysis software platform, analyze the loading capacity and stiffness of aerostatic guideway under different sports mode.2、Establish the linear motor drive of the aerostatic bearing stage system control mathematical model, design a p-pi motion control system, and analysis the system response characteristics influenced by control parameters of position loop proportion Kpp, speed loop gain proportion Kvp gain and integral gain Kvi, and moving parts quality M with MATLAB.3、Based on mechanical system dynamics analysis software platform ADAMS and control system analysis software platform MATLAB, Establish the mechanical and electrical joint simulation model of straight drive type aerostatic bearing stage, then studied its position, velocity, acceleration motion characteristics under the control parameters Kpp, Kvp, Kvi, Kvf, Kaf and load quality m influenced.Finally, put forward the control system improvement scheme, and joint simulation analysis.4、Build straight line drive type of aerostatic bearing stage, test and analysis the motion characteristics of linear driver aerostatic bearing stage by the single factor experiment scheme. At last test the motion characteristics and positioning accuracy of the experimental platform by laser interferometers equipment and research precision compensation.