Study On Preparation、Structures And Properties Of AZO Transparent Conductive Films

Transparent conductive oxides (TCO) film is a kind of very important photoelectric information material, close to the conductivity of the metal, visible and infrared spatial pervious spatial reflectivity and photoelectric characteristics, widely used in solar cells, LCD, electrostatic screen, sensors, LED and other optoelectronic devices.It has always been the hot spot of the domestic and foreign research. In recent years, new transparent conductive AZO (ZnO:Al) film attention by scientists, obtained very extensive research. AZO film relative to the other in TCO film, with cheap price, the source is rich, non-toxic, deposition temperature is lower, in hydrogen plasma has better stability in and easy to realize the industrialization of large area coating and other advantages, and also has the ITO thin film with a par. photoelectric characteristics. AZO film application prospect is very extensive, is considered the most potential of a new generation of transparent conductive film.This paper expounds completely the transparent conductive physical mechanism of AZO film, in-depth analysis various factors of the impact of transparent and conductive AZO thin films, study the structure characteristics of the material of sintering step by step, and there are some pointed experiment method to design, research and development to a high transparency and high conductivity of AZO film.This paper use sol-gel method, and choose Zn(CH3COO)2·2H2O as raw material, Al(NO3)3·9H2O as doping agent, ethanol solvent, two ethanol amine for stabilizer. AZO transparent conductive films with high transmittance and highly conductive were successfully prepared by sol-gel method and a dipping down coating device. Tests show that the low sheet resistance is24Ω/□, the average transmittance is above80%.Further use XRD, SEM, TEM, TG-DSC, UV-VIS, four probe method, and other test methods characterize the crystal structure, surface morphology, electricity properties and optical properties of AZO film prepared in different process conditions. Also discusses in detail the heat treatment atmosphere, Al quantity, sol-gel doping concentration, the film layer and annealing temperature and other technological factors on the performance of AZO film.Through the comprehensive analysis of the results of the experiment, and get high conductivity, preparation high transparency AZO film the best technical parameters:sol concentration0.75mol/L, Al doped with2%amount, the film layer and layer, the heat treatment temperature of500℃,550℃heat treatment temperature late, nitrogen annealing temperature of500℃. This research results have the certain reference significance to the preparation of high performance AZO film.