3D Measured Methods And Machined Accuracy Of Micro-pyramid Structured Surface

Machined micro-structured arrays on components surface may produce new functions,which can enhance system performance. Nowadays, micro-structured surface evaluation isconsidered only on fine extent and deep to width ratio, so it can not totally revealcharacteristics of micro-structured surface. In this way, micro-pyramid structured surface withheight dimension for100m to200m was micro-ground on silicon surface utilizing microV-tip of diamond grinding wheel, and3D measurement mode and machined form accuracyevaluation of micro-pyramid structured surface were proposed based on micro-spacedmatching technology of measured point cloud. In micro-spaced matching of measured pointcloud,3micro-structured surface models were constructed, including grid point model, slashprofile model and horizontal profile model, and aiming on scale of smooth micro-pyramidstructured surface smaller than50m, adaptive direction measurement method was proposed.First, micro-pyramid structured surface were ground by micro V-tip of#400,#600and#3000diamond grinding wheel on silicon surface, respectively. Then, micro-ground surfaceswere measured by white light interferometer. It is found out that micro-pyramid structuredsurface micro-ground by#400and#600diamond grinding wheel showing disintegrated andintegrated micro-pyramid structured surface, respectively. But, micro-pyramid structuredsurface micro-ground by#3000diamond grinding wheel is more smooth losing a largeamount of measured points, therefore, adaptive direction measurement method based onmeasurement angle was proposed.Analyzed results shows that average form error after matching was gradually reduced asmatching times increased during measured point cloud matching, and average form error cancome to a convergence value, which is called micro-structured machined form error. Whengrid point model is utilized during matching, reduced grid size can improve form error, butdecrease matching efficiency. What is more, parallel of micro-pyramid structured surfacecharacterized slash profile model and horizontal profile model to grid point model showscharacterized profile models have more precise matching accuracy and higher matching efficiency. And slash profile model has the highest characterized profile accuracy.Utilized that evaluation mode, it is discovered that average form error of disintegrate andintegrated surface are23.8m and7.9m, but characterized profile error are37.2m and19.0m, characterized peak error are51.2m and34.1m, respectively, which indicatescharacterized profile and characterized point error are much bigger than machined averageform error.In adaptive direction measurement of smooth micro-pyramid structured surface withheight dimension as50m, this method can inhibit all kinds of noise points generated onprecipitous surface using white light interferometer detection and greatly improve effectivemeasured points, may seize profile of micro-pyramid structured surface. the result showssmooth micro-pyramid structured surface with height dimension as50m evaluation valueare that form error is5.3m, characterized profile error is7.7m, characterized peak error is15.9m.