Volumetric Error Modeling And Analysis For NC Micro-grinding Machine Tool

With the rapid development of mechanical manufacturing technology, micromechanical manufacturing technology is the emergence of the significant breakthroughin the field of mechanical, and micro processing technology and processing precisionare put forward higher request. Micro mechanical manufacturing technologydistinguishes MEMS technology and ultra-precision processing technology, is the“middle part” between micro mechanical processing technology based onsemiconductor manufacturing technology and traditional precision processingtechnology，high efficiency and high accuracy machining is the effective way of themicro parts.Based on self-designed CNC micro-grinding, the paper discusses the main impactof CNC micro-grinding machine precision error. Geometric error, load error andthermal deformation error is typical of CNC micro-grinding sources of errors.Using multi-body system theory, topology structure and low-order body of theCNC micro-grinding are described. According to the CNC micro-grinding process,combined with the link of the grinding machine between agencies and agencies,reached the characteristic matrix between the bodies, the establishment of the CNCmicro-grinding synthesis volumetric errors modeling. According to the establishmentof the CNC micro-grinding synthesis volumetric errors, to determine the change rulesof the typical error，which includes loading errors, thermal deformation errors andgeometric errors of the micro-grinding.Reach uses the finite element method, the vibration theory and the thermalanalysis of error analysis, analysis the static, dynamic and thermal of the electricspindle and work-piece spindle. Study the distribution of deformation and vibrationmode changes, get the maximum deformation. Based on the static, dynamic andthermal analysis of the x-axis table, y-axis table and z-axis table, study the distribution of deformation, get the maximum deformation and provide the basis for errorcompensation.It based on the synthesis volumetric errors model, the determination of the actualtool path to CNC instructions of the relationship. Tool path equation is deduced, andthe analysis of the tool path error equation and the attitude error equations. Accordingto the relationship of the actual tool path to CNC instructions of the CNCmicro-grinding, proposed error compensation information.