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Studies On Horizontally Aligned Carbon Nanotubes-based Field-effect Transistor And Its Application In The Detection Of Benzene

Posted on:2013-09-21Degree:MasterType:Thesis
Country:ChinaCandidate:P LiFull Text:PDF
GTID:2231330395951851Subject:Theoretical Physics
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In this thesis, copper chloride was used as catalyst precursor, which wasoxidized to produce copper oxide. The as-prepared copper oxide was further reducedto copper in hydrogen atmosphere at high temperature, which was evaporated tosingle crystal quartz substrate without catalyst template. Using methane as carbonsource, the aligned single-walled carbon nanotube arrays (SWCNTs) weresynthesized by chemical vapor deposition on the single crystal quartz with coppercatalyst. The structure and morphology of the as-prepared SWCNTs werecharacterized by Scanning Electron Microscopy (SEM), Atomic Force Microscopy(AFM) and Raman spectrum. The average density of the as-prepared SWCNTs was2SWCNTs per micrometer. This approach does not employ catalyst template,which reduces the production cost and overcomes some difficulties in the process ofmicrofabrication due to the lack of SWCNT in the position of catalyst stripes. TheSWCNTs were transferred onto the SiO2/Si substrate by PMMA. We fabricatedField Effect Transistor (FET) devices with the transferred SWCNTs usingmicrofabrication technologies. Electrical measurement results of these FET devicesindicated that the SWCNTs show P-channel characteristics. The SWCNT-basedFET devices were used to detect benzene molecules. When the sensor devices weretreated by oxygen plasma and modified with Pd particles, the detection sensitivityobviously increased and the concentration detection limit of benzene was up to0.1part per million.
Keywords/Search Tags:the aligned single-walled, carbon nanotube sarrays, sensormicrofabrication, benzene field effect transistor
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