Mechanical Structural Design And Finite Element Analysis Of Micro-nano3D Positioning Stage

Coordinate Measuring Machine(CMM) is widely used in precisionmeasurement, the increasing development of high-precision technology promotethe development of nano-testing technology, and require higher performance andaccuracy of the CMM. Therefore, the development of Nano-CMM has becomeimperative. Nanoscale measurements demand on higher structure precision ofNano-CMM’s3D positioning stage, Nano‐CMM’s3D positioning stage isresearched and designed in this paper.The main structural of the Nano-CMM is designed by “331” principle.Combined with the main structure and precision mechanical design principles, themechanical structure of the Nano-CMM’s3D positioning stage is designed bymechanical design software Soliedworks. The design include selection of theuniversal device, selection and adjustment mechanism design of the measuringdevice, co-planar2D positioning platform component design, Z axis positioningplatform component design and the base station design.Axes and parts of the micro-nano3D positioning plantform are modeled andanalyzed in different working state by the finite element analysis software ANSYS.Analysis conclusions include: during the moving of x and y axis platforms,thegravity of the worketable of Z axis and its Weight cause an exaggeratedly structuraldistortion, so a force balance system was added; the X or Y axis platform has a toolarge weight deformation, for meeting the design mechanical accuracy, increasingthe thickness of X and Y axis platforms properly and adding reinforcing ribs toreduce their own gravity deformation.The mechanical structure of this paper has been applied to Nano-CMM.Afterthe general assembly, adjustment and testing,3D positioning stage meet the designrequirements.