3-DOF Precision Positioning Table And Manufacturing Process Technology

Nano imprint lithography is one of the most promising technologies used insemiconductor chip manufacturing method with a low cost and high productionefficiency advantage. The study on nano imprint lithography have boomingdevelopment, of which precision positioning table positioning technology has a greattheoretical significance and value. Precision positioning table is the key part of nanoimprint lithography equipment, the positioning accuracy of which directly affects thegraphics displacement accuracy, cutting precision, alignment accuracy and resolutionof lithography equipment. The precision of table directly determines the accuracy andquality of the imprint.According to the theoretical analysis of the improved design of the deltamechanism, based on kinematics and simulation analysis of stiffness,3translationaldegrees of flexible parallel precision positioning table for nano imprint lithography isdesigned and manufactured, which is driven to achieve precise positioning by thevoltage controller made up of three piezoelectric ceramic actuator.The precision of flexible hinge’s Machining dimensions is measured using thethree-coordinate measuring machine. The process of improvement is offered on theanalysis of the cause of the error.Using modal analysis system for dynamic characteristics analysis of precisionpositioning table, through the comparison with Pro/Mechanica simulation data, thedynamic model of precision positioning table is verified. The experiment is helpful toimprove the dynamic performance of precision positioning table.