Design And Investigation Of High-Speed And High-precision Positioning System For IC Packaging

In order to develop a high speed and high precision positioning system, based on the 2-D high precision table designed before, the dissertation has a detailed experiment analysis of dynamic performance. At the same time, it deals with the key issues about the dynamic control algorithm of the table drived by Voice Coil Actuator and air bearing technology, and the like. The following works and achievements have been completed.Using Renishaw's ML10 Gold Standard laser system, some experiments to analyze the static and dynamic performances of each axis have been done. The step responses', square-wave responses'and continuous responses'data of each axis in different conditions have been got. The results demonstrate that the static performance is good and the dynamic performance couldn't reach the requirements. Otherwise, the variable frictions, inertia, and stiffness of precision positioning table make the acceleration of the system unstable.In order to get a good dynamic characteristic of the table, based on the dynamic modeling of complicated X-axial Electro-Mechanical System drived by Voice Coil Actuators, the controllers have been designed. As a result, a high robust controller which is easy to come true is got. Through the theory analysis and simulation experiments, it is proved that this kind of controller improve the dynamic characteristic well. It has a short setting time, little overshoot, fast dynamic response. This kind of controller can effectively restrain disturbance.The structure and debugging of Z-axis motion control system is partly introduced. The related key technologies, such as hybrid force/position control and vision system calibration, are studied. Portion of experiment projects has been present.In order to reduce the friction of positioning table and make it unvaried, a positioning table with air bearings has been introduced. An air decoupling mechanism is designed to make the voice coil actuators placed on the base and effectively reduce the motion inertia. The detailed principle is present. The rules how carrying capacity and stiffness of the table change with the orifice dimension, bearing clearance and length-dimension ratio is discussed. At the same time the optimized dimensions of air bearing are given. On the basis of them, the kinematic stability of the table is analyzed in detail, and the table could be stable rapidly with given starting conditions. All the achievements would provide theoretic reference to the design of this kind of positioning table with air bearings.