The Design And Realization Of Driver For Low-voltage PMSM

Vacuum robot is in charge of transferring the wafer from one craftchamber to another of cluster tools, it is one of the most important partsin the cluster tools. Vacuum robot is driven by low-voltage permanentmagnet direct drive motor with large gap between rotor and stator, whichhas a special demand on its driver’s interface and performance, so thecommon commercial drivers don’t meet the demand. Designing a highperformance motor driver plays an important role to make the vacuumrobot work stable and reliable.The dissertation takes low-voltage permanent magnet direct drivemotor with large gap between rotor and stator as an object, in view of itsfeatures, a low-voltage permanent-magnet synchronous motor’s sevodriver is designed. First, the model of PMSM is established and thedriver’s the whole scheme is established based on the control strategy ofId=0and the drive mode of SVPWM vector control. Then, using a highperformance digital controller DSP as kernel, the driver’s hardware isdesigned of switched power supply module, three phase inverter module,current inspection module, rotor position detection module and RS232communication module etc. The driver also has surge current prevention, over current, over voltage and discharge circuit. Using modularizationmethod to design the driver’s software, include RS232communicationroutine, rotor position detection routine, rotor position initializationroutine, PID controller routine, SVPWM generating routine and so on.The driver has an inner current loop and outer speed loop structure. Baseon the scheme above, a prototype and a low-voltage permanent-magnetdirect drive motor test platform is made. The results of driver’sperformance testing show that, the driver designed is able to control thelow-voltage permanent-magnet direct drive motor reliably and meet therelated demand. It provides sturdy foundation for the further developmentof low-voltage permanent magnet direct drive motor with large gapbetween rotor and stator.