Dynamic Performance Analysis And Support Structure Design Of Light-weight Mirror

This thesis researches the dynamic extend target equipment in making, whichuses a500mm mirror. It will uses light-weight mirror to reduce the weight of mirror.In the process of the dynamic extend target equipment work, the light-weight mirrorneeds to do circular motion, the maximum acceleration is10°/s2, and the maximumvelocity is40°/s. The deformation of mirror will happen because of the force ofmovement and gravity, the mirror’s figure is key technical index of mirror, whichaffects the image quality of optical system. The budget of mirror’s deformation is:PV≤1/15λ=42nm, RMS≤1/40λ=15nm. This thesis is dedicated to design supportstructure of light-weight mirror and analyze the mirror’s deformation. The majorresearch contents are included in the following:1) The force of mirror was analyzed. The reference coordinate system and themirror’s coordinate system are erected for analysis, the transform matrix of thereference coordinate system and the mirror’s coordinate system is got. We calculatedthe values of gravity and force induced by circular motion at mirror’s coordinatebased on the transform matrix.2) Data process algorithms of mirror’s figure are investigated, the data processsoftware based on Zernike polynomial is written by using MATLAB. The supportstructure of light-weight mirror is designed.3) Based on the support structure, the deformations of mirror are analyzedunder gravity and the force of movement. The deformations of mirror are analyzedin different bolt pretightening force. The thermal deformations of mirror areanalyzed at different thermal environment. Lastly, modal analysis of mirror’s supportstructures has been done.