The Optimization Design For The Overload Capacity Of The Multi-range Micro-accelerometer

As the use of MEMS became extensive, the study on accelerometer array has become animportant research orientation. Multi-range accelerometer can measuring the full-range from10g to10,000g, and the application involves industry, national security and other aspect ofsocial life. But there are many problems to be solved when the accelerometers work underhigh overload. First of all, when measuring high-G acceleration, the lower range mode worksproperly. Secondly the package high resistance to overload ability can not make it workproperly. Thirdly the accelerometer has short of stability when high overload experimentrepeatedly.We design a high overload resistance technique that can be appropriate for the requirementby testing high resistance to overload ability and analyzing the problem when high experimentafter accelerometer optimizing. The test result shows that the structure and package can befeasible and applicable and can satisfy the requirement when it works under high overload.This paper analyses failure mechanism and has a large number of experiment and analysesthe problems when works under high overload. Combined with theoretical analysis, wepropose the structure and package optimum design scheme and have simulation analysis withANSYS. The results show that the high resistance to overload ability has been enhanced andcan satisfy the requirement of20,000g high overload. When direct against the problem whentest the package of accelerometer, we redesign the package and analyze how the tube,adhesive and pouring sealant affect the high resistance to overload ability and determinate theparameters at last.The results show that the scheme enhances high resistance to overload ability with effectand can satisfy the requirement of20.000g high overload.