The Design And Fabrication Of Single-Order Diffraction Grating

X-ray has gradually attracted the attentions of the world’s scientists since discovered. Now, it has become an essential tool for scientific study.X-ray diffractive elements compose an important category in X-ray optics, which have a broad application in the field of the inertial confinement fusion, astronomical telescopes, synchrotron radiation and EUV lithography.However, in many applications, only the first order is necessary, and unwanted higher orders might cause overlapping of the wavelength range and limit the free spectral range of the grating, which usually degrade the performance of a system. In allusion to the above situation, this article introduces the type of single-order diffraction grating using modulated groove position(MGPGs), proposed a hybrid fabrication process of electron-beam lithography, X-ray lithography, UV lithography and micro-electroplating process and successfully product it,which have the sample structure, and research the technical questions and the solutions of fabricating.