Designand Performance Study Of The Fast Toolservo For Microstructured Surfaces Fabrication

The microstructured surfaces is refers to the surface that have the sub-micronsurface shape accuracy, nanoscale tiny geometry of the surface roughness.For theyhave excellent abrasion resistance, adhesion and optical performance, and they arebecome more and more widely used in civilian industry, aerospace and defense industry.The ultra-precision turning processing technique with high precision, high frequency,high efficiency characteristics, based on fast servo tool (FTS) have become the mosteffective and the most promising technology in machining microstructured surfaces. Atpresent, some developed countries have obtained certain achievements in this field,developed a variety of fast servo machining systems, and processed a variety ofhigh-precision microstructured surfaces. However, domestic research of this aspect isstill at the early stage, has a great gap compared with abroad. In this paper, the designand performance study of the FTS for microstructured surfaces is studied.This paper determine the design requirements of the fast servo tool by analyzingthe surface formation that the influence of various parameters on the microstructuredsurfaces. By the research working principle and structure of FTS system. Proposing theFTS designing scheme based on the piezoelectric ceramic as driver, and the flexibleparallel plate mechanism as guide mechanism. Select of key components ofpiezoelectric ceramic according to the design requirements, and carry on the stiffness offlexible plate calculation and structure optimization design, then calibrate the resonantfrequency and the restoring force of the organization, and calculate the pre-tighteningforce.The finite element simulation model of guide mechanism is Established. Thestatics and dynamics simulation analyses for the guide mechanism are carried out.Statics simulation analysis gets the forced deformation and stress distribution of theflexible plate. Dynamics simulation analysis gets each-order modal and vibration modeand response of the dynamic force. By these ways check the designed mechanism.The mathematical models of piezoelectric ceramic and mechanical mechanism areestablished, and simulated the open loop state of time domain and frequency domainresponse by MATALB, and also simulated the closed-loop system which controlled by the PID controller to the FTS system. The tracking performance of the closed-loopsystem are analyzed in the simulation.Through the experiment, the performance of the fast tool servo are analyzed. Thestiffness and natural frequency of flexible tool carrier performance was tested.Compared with the theory and simulation, obtain both the actual performance of the fasttool servo and verified the correctness of the simulation.