Research On Fast Tool Servo System Drove By Double Piezoelectric Ceramic

Microstructure optical elements are widely used in the fields of civil,military and aerospace.With the advantages of high efficiency and high precision,the ultra-precision Fast Tool Servo(FTS)system processing technology is increasingly used in the processing of microstructure optical elements.The processing of small periodic microstructure whose feature sizes less than 100?m microns required the high dynamic performance of FTS and a certain displacement output under the condition of high frequency.The high stiffness of the flexure hinge of FTS drove by single piezoelectric ceramic leads to the displacement loss of piezoelectric ceramic in the high frequency motion,and the highest working frequency is 320 Hz,which cannot meet the demand of small periodic microstructure processing.This article focuses on the deficiency of the drive with single piezoelectric ceramic and reduces the displacement loss of the piezoelectric ceramic with use of the drive with double piezoelectric ceramics,and develops a set of FTS system with high frequency.The main research content are follows:1)The principle of FTS drove by single piezoelectric ceramic is analyzed.Based on the performance test of FTS drove by single piezoelectric ceramic system and the processing test of small periodic microstructures,the influence factors of flexible hinge to FTS system are analyzed and the reasons of the reduction in performance are summarized.2)Aimed at the deficiency that the stiffness of the flexure hinge results in the displacement loss of piezoelectric ceramic,the idea of driving the feed and return respectively by double piezoelectric ceramic is put forward,and the FTS system drove by double piezoelectric ceramic is designed.Based on the analysis of the theoretical model,the solid model of system is developed.3)The statics,dynamics and structural parameters optimization of the transmit mechanism of the designed FTS are analyzed with the finite element simulation,which makes the performances meet the requirements of the system at work.4)The static and dynamic performance tests of the FTS system drove by double piezoelectric ceramic are carried out.Compared to the results of the FTS system drove by single piezoelectric ceramic,the increase of the system performance is validated.Then the sinusoidal radiation microstructure parts are processed with the system,and the machining surface quality of the parts are measured and evaluated.