Research On Properties Of ZrMoN、ZrAlMoN Composite Films And ZrAlN/Mo₂N Multilayer Films

A series of ZrBN composite films with different B target power, a series of ZrWNcomposite films with different W content, a series of ZrMoN composite films with differentMo content, a series of ZrAlMoN composite films with different Mo content and a series ofZrAlN/Mo₂N multilayer films with different modulation periods were prepared bymagnetron sputtering technique. The microstructure, mechnical properties and tribologicalproperties of theses films were investigated by means of X-ray diffraction, nano-indentation（CSM）, ball-on-disc tribometer and scanning electron microscope （SEM） with energydisperse spectroscopy （EDS）.The studies on the ZrBN composite films indicate that the power of B target is nomore than30W and the coatings exhibit fcc ZrBN structure. When the power of B target isabove30W, the films reveal a two phase structure comprising fcc ZrBN phase and hcpZrB2phase. When the power of B target is24W, the hardness and friction coefficient ofcomposite films is29.3GPa and0.75, respectively. With the increase of B target powerhardness and friction coefficient gradually decreases. With the increase of temperaturefriction coefficient of ZrBN composite films with B target power of24W decreases andthen increases.The studies on Zr1-xWxN（x=0.17,0.28,0.36,0.44,0.49） composite films indicate thatwhen x is no more than0.28in the film, the films exhibit fcc （Zr,W）N structure. When x isbetween0.36and0.44, the films reveal a structure comprising fcc （Zr,W）N and fcc W2N.When x is0.49, pure β-W appears. The hardness of the Zr1-xWxN films increases and thendecreases with the increase of x. The maximum value is36.0GPa when x is0.44. At roomtemperature, the friction coefficient of the Zr1-xWxN films shows down-up curve with theincrease of x.The studies on Zr1-xMoxN（x=0.05,0.14,0.42,0.52） composite films indicate thatZr1-xMoxN composite films mainly exhibit fcc （Zr,Mo）N structure. With the increase of x,fcc Mo₂N phase appears in the film. The hardness of the film increases from28.1GPa（ZrN）to29.6GPa（x=0.05）. x continues to increase, the hardness gradually decreases. At roomtemperature, friction coefficient of ZrMoN composite films reduces from0.69（ZrN） to0.44（x=0.14）. x continues to increase, the friction coefficient increases slightly. The frictioncoefficient of Zr0.58Mo0.42N composite films decreases and then increases with the increaseof temperature. The friction coefficient reaches a maximum value at300℃. Temperaturecontinues to increase, friction coefficient gradually decreases. The studies on ZrAlMoN composite films indicate that ZrAlMoN composite film withMo atomic fraction of15.46exhibits fcc （Zr,Al,Mo）N structure. When Mo content is no lessthan21.50at.%, the coatings reveal a dual structure comprising fcc （Zr,Al,Mo）N and fccMo₂N phases. The hardness of ZrAlMoN composite film with Mo atomic fraction of15.46is30.2GPa. Mo content continues to increase, the hardness gradually decreases. At roomtemperature, friction coefficient of ZrAlMoN composite films gradually decreases with theincrease of Mo content. The friction coefficient of ZrAlMoN （Mo40.50at.%） compositefilms decreases and then increases with the increase of temperature. The friction coefficientreaches a maximum value at500℃. Temperature continues to increase, friction coefficientgradually decreases.The studies on ZrAlN/Mo₂N multilayer films indicate that ZrAlN/Mo₂N multilayerfilms with different modulation period exhibit fcc structure. The hardness of ZrAlN/Mo₂Nmultilayer films is higher than the value caculated from the rule of mixtures, but super harddoes not appear. At room temperature, friction coefficient of multilayer films graduallydecreases with the increase of modulation period. At700℃，effect of modulation period onfriction coefficient is not obvious and the friction coefficient is about0.35. With the increaseof temperature the friction coefficient of ZrAlN/Mo₂N multilayer films with modulationperiod of16nm decreases and then increases. The friction coefficient reaches a maximumvalue at500℃. Temperature continues to increase, friction coefficient gradually decreases.