Preparation And Characterization Of PTFE/ZrAlN/Ag/ZrAlN Films

Energy conservation is one of the most effective ways to solve the problem of environmental pollution.The consumption of building energy account for 1/3 of the total energy consumption,and which affects living and production activity of humans directly.With the development of urban constructions and human society,building energy consumption increased continuously.To solve the problem of high building energy consumption,window materials should be taken into consideration to lower this consumption.The Low-E glass has a better energy saving effect and higher thermal insulation coefficient than other energy-saving glasses.However,ordinary Low-E glasses have poor light transmittance,short life expectance,poor corrosion resistance,and poor stain resistance.In order to improve the energy saving and visible light transmittance capacity of Low-E glasses,also to increase their corrosion resistance and stain resistance,ZrAlN,Ag,and PTFE films were prepared using RF magnetron sputtering on glass substrates at room temperature under different parameters.Microstructures,optical properties,chemical compositions,and tribological properties of the coatings were investigated using scanning electron microscope?SEM?,surface profile-meter,UV visible spectrophotometer,Fourier transform infrared spectroscopy,X-ray diffraction?XRD?,and X-ray photoelectron spectroscopy?XPS?.Based on the previous results,ZrAlN?80 nm?/Ag?12 nm?/ZrAlN?8 0nm?Low-E films and PTFE?270 nm?/ZrAlN?80 nm?/Ag?80 nm?/ZrAlN?80nm?hydrophobic Low-E films were obtained.The films were proved with excellent optical properties and also with good corrosion resistance and contamination resistance.Based on the result of single layer film acquisition using magnetron sputtering:ZrAlN thin films are found with excellent visible light transmittance and a certain degree of infrared reflectivity,especially the film coated under 110 W of Zr target and Al target power,6 sccm of N₂ flow rate,and 210 min of sputtering time.The thickness of obtained film is 141 nm,the visible light transmittance at the 550 nm reaches 93.4%,the infrared reflectance is 21.54%,and the emissivity is 0.74.At the same time,the nano-scratch test and salt spray test indicate the ZrAlN film has excellent mechanical properties and corrosion resistance.The surface resistance of the prepared single-layer Ag film is 8.08?/?,the visible light transmittance at 550 nm is 73.2%,and the theoretical emissivity is 0.099.The thickness of the prepared PTFE film is 276.63 nm,the static contact angle of the film is 124.8�,and the average light transmittance in the visible light region is 91.2%.The results show that the Low-E films?ZrAlN?80nm?/Ag?12nm?/ZrAlN?80nm??have good optical properties and corrosion resistance.The maximum visible light transmittance is 83%,and the visible light transmittance at 550 nm is 80%.The films have good corrosion resistance to acid,alkali and salt,and the visible light transmittance difference does not exceed 4%after the corrosion experiment.PTFE?270 nm?/ZrAlN?80nm?/Ag?12 nm?/ZrAlN?80 nm?hydrophobic Low-E films have a static contact angle of130.2�,the maximum visible light transmittance is 82%,the visible light transmittance at 550 nm is 79%.The average visible light transmittance exceeds 75%in the entire visible light region,and the external emissivity is 0.11.