Study On The Control System Of The High-Speed And High-Precision Positioning Table For High-End Manufacturing Equipment

The technology of High-Speed and High-Precision motion control is widely usd in chip packaging equipment and CNC machining center as a general technique.With the development of itegrated circuit packaging to the tendency of high integration density, multiplied lead and fine pitch in the integrated circuit industry, the requirements for the speed, acceleration, precision and stroke of the packaging equipment’s motion mechanism are more and more strict. And with the innovation of tool material, the cutting speed of CNC machine and CNC center is raised from12m/min to120m/min. Now it is a great challenge to the design of high-speed and high-precision positioning platform as well as the servo control strategy. So the exploring of the research on key technique of the high-speed and high-precision positioning platform for chip packaging equipment and CNC machining center is of great important theoretical significance and application value to improve the development of High-End Equipment Manufacturing industry in China.Aim at High-End Manufacturing Equipment, such as the chip packaging equipment and the High-speed CNC machining center, the high-speed and high-precision positioning platform drived by Linear Motor is build in the paper, and the control strategy for the platform is studied. The major research contents and achievements are as follows:1. The hardware and software systems of the positioning platform are designed and built firstly. The X-Y table of the platform is drived by high precision Permanent Magnet Synchronous Linear Motor (PMSLM), and linear grating is used in the end of motion mechanism to realize the closed-loop control. The strategy of the control system is designed to the open CNC system based on IPC+MC, and the high-performance PMAC motion card is used to make the control system open, reliable and extensible.2. The strategy, working principle and classification of PMSLM are introduced, and then the mathematical model of PMSLM drive system is built. The servo control system apply the compound control strategy based on PID+Velocity/Acceleration feedforward algorithm, and the improved mathematical model of linear motor servo control system is built to provide theoretical basis for the control of the experiment platform. The experimental results indicate that the compound control strategy can effectively improve the tracking performance of servo system and maintain the system steady.3. Through the debugging software and repeated experiments, the servo control parameters are modulated, which include PID parameters, velocity/acceleration feedforward parameters and friction compensation parameter. After modulating control parameters, make the whole system obtain good dynamic property and steady state property.Finally test the performance indexes of the platform through experiments, which include positioning accuracy, repeat positioning accuracy, maximum steady speed and maximum acceleration. The experiment results indicate that the high-speed and high-precision positioning platform built in this paper can meet the positioning requirements of IC packaging device and CNC machining center.