Research And Design Of Structure Integrated Positioning Platform With High-Accuracy And Large Travel

The rapid development of the micro/nano technology has greatly contributed to the advancement of modern industrial civilization.Development of the micro/nano technology depends largely on the progress of spatial micro/nano positioning technology.The spatial micro/nano positioning technology is more difficult and challenging than macro positioning technologies.Hence,research of engineering theory about the spatial micro/nano positioning technology has in seat order become a hot topic in recent years.The micro/nano positioning platform is an important carrier of the spatial micro/nano positioning technology,and research of engineering theory has important significance.In this paper,in connection with challenges faced of engineering design of the spatial micro/nano positioning technology,revolving design theory issues of structure size of the micro/nano positioning platform,based on double parallel-oriented positioning platform and dual composite parallel-oriented positioning platform,the work of study and application of improving positioning accuracy of positioning platform with different guide mechanism is focused on.The main contents are as follows:(1)Mechanical theoretical research of micro/nano positioning platform was presented.Based on double parallel four-bar linkage and dual composite four-bar linkage,the affecting relationship was established between the maximum deformation(stroke)and the maximum equivalent stress of mechanism.On this basis,using finite element analysis,designing size parameters,with the same maximum deformation and maximum stress of the two institutions,stiffness formulas were established for each degree of freedom.Combined with modal analysis,study about the vibration based on each degree of freedom of two guiding mechanism under the size parameters was done.Comparative results of two parallel four-bar linkage and dual compound under the four-bar linkage were given under each degree of freedom.(2)Properties of micro/nano positioning stage driven were studied.Based on piezoelectric ceramic stack PST 150/5 × 5/20,creep characteristics,hysteresis characteristics,the resolution characteristics of repeat performance characteristics of the piezoelectric ceramic drive were analyzed.The theoretical analysis and experimental results show that:under the nano positioning conditions,opposite installation of the rigid spring and high vice connection of-hemisphere can improve Piezo-ceramic actuator's force output;Piezoelectric actuators can meet the requirements of the nano-level position;in the open-loop,the temperature characteristics and hysteresis of piezoelectric actuators can reduce positioning accuracy when voltage increascd and this error can be reduced by post-processing.(3)Experimental study of processing micro/nano positioning stage was done.Combined with preliminary size parameters design of institutions and processing drawings,used analysis conclusion of piezoelectric ceramic drive performance and installation methods,experimental test systems of micro/nano positioning platform was established.Experimental measurement of repeatability and hysteresis measurements in open-loop micro/nano positioning stage were completed,and the calibration function of the platform was given.The experiment explained that theoretical analysis of improving positioning accuracy of the positioning platform under different guiding mechanism has some reasonable.Research work of this paper enriches the design theory of micro/nano positioning platform,and compared to double composite guiding mechanism as micro/nano positioning platform,with meeting the large stroke,a dual parallel guiding mechanism as micro/nano positioning platform guide mechanism having the superiority of achieving high-precision positioning was proved,because of positioning accuracy improving 1 nm.