Design And Study Of A Micro Electromagnetic Vibration Energy Harvester

With the development of MEMS technology, the conventional micro-power supply can no more satisfy their power requirements. Knowing how to power these micro devices presents a problem which demands a prompt solution to promote their practical application. As a self-generating micro-power, electromagnetic vibration energy harvesting can take advantage of mechanical energy in the environment. They could convert it into electrical energy for various low-power MEMS devices. Therefore, scientific research institutions are paying more and more attention to them.This dissertation mainly focuses on the lower-frequency vibration environment. The design of the micro electromagnetic vibration energy harvester is based on the analysis of the home and oversea research progress. The physical model is established by using mechanical vibration theory and electromagnetic theory. ANSYS Workbench FEA software is used to simulate the vibration characteristics of the energy harvester. ANSYS Workbench software is also used to simulate and analyze the electromagnetic characteristics of the energy harvester. The main work and the conclusion of this dissertation are as follows:1. Research status of micro electromagnetic vibration energy harvester. The recent advances of micro power supply are explained. The problems encountered during the development of micro power are introduced. Micro electromagnetic vibration energy harvester has become an important research target. The principle and research state of the electrostatic conversion, piezoelectric conversion and electromagnetic conversion micro power are described. Micro electromagnetic vibration energy harvester has become one of the most potential technologies. What’s more, current research status and issues of micro electromagnetic vibration energy harvester are introduced. Finally, the development trend of micro-electromagnetic vibration energy harvester is reviewed.2. The establishment of the physical model of the electromagnetic vibration energy harvester and theoretical analysis. According to mechanical vibration theory and electromagnetic theory, the mechanical and electromagnetic characteristics are discussed in this paper. They provide a theoretical basis for the structural design of the electromagnetic vibration energy harvester.3. Design of the micro electromagnetic vibration energy harvester. A micro electromagnetic vibration energy harvester structure is proposed in this paper. The device uses an iron-type structure, whose unique design is a closed magnetic circuit, including a ladder-type copper coil, a four-helix-type spring beam, a cylindrical permanent magnet, a nickel-plated frame body and substrate. The advantages of the composition and design, work principle and the manufacture steps of the LIG A technology process of the device are explained in detail.4. Optimization design of the micro electromagnetic vibration energy harvester. ANSYS Workbench FEA software is used to simulate the vibration characteristics of the energy harvesting system. ANSYS Workbench software is also used to do a series of magnetostatic simulations to analyze the output voltage, the maximum active power of the energy conversion system and the influence of the plane spring beam’s parameters such as width, thickness, interval, quality of the permanent magnet on spring beam deformation, stress, modulus of elasticity, oscillator resonance frequency, permanent magnet resonance amplitude. Finally, the structure parameters of the energy harvester are determined.