Design And Analysis Of Three-axis Electromagnetic MEMS Energy Harvester

With the speedy development of ultra-low-power technology and MEMS technology,low-power electronic devices became wide employed in numerous fields.However,the battery energy usually utilized by these devices is troublesome to satisfy their increasingly improved functions and semi-permanent standby needs,thus requiring a lot of manpower to charge or replace the electricity regularly.If the battery is exhausted and can’t get replaced in time,it may pollute the environment with toxic substances due to the long storage time of the battery.Therefore,it is necessary to hunt property,clean and reusable energy to unravel the facility provide issue of this instrumentation.So far,many potential solutions have been designed,such as solar energy generation,alternative energy generation,etc.These energy sources have low value,no pollution and no need for regular maintenance,but they have requirements on the area and time of usage.In contrast,mechanical vibration energy is widely distributed,less affected by the environment,and more attractive.At present,the main strategies of collection vibration energy square measure electricity,electricity and magnetism.Compared with 3 energy assortment strategies,the electromagnetic type is wide used as a result of it doesn’t need further application of voltage and has comparatively low resistance and high output current.According to the characteristics of the magnetism energy collector,this paper studies the three-axis MEMS magnetism energy collector.Firstly,the designed structure is sculptural,simulated and optimized,and therefore the structure style of the three-axis MEMS magnetism energy collector is completed.After that,the key process technology of MEMS lithography,etching and bonding was studied,the specific processing flow and mask layout of the energy harvester were designed.The principle prototype was manufactured through lithography,deep silicon etching and bonding technology,and the device process was completed.Finally,the device is characterised and tested once its fabrication.Under sinusoidal frequency excitation with acceleration of 1 m/s~2,the natural frequencies of the three-axis MEMS magnetic attraction energy harvester are measured to be 366 Hz,362 Hz,353 Hz.The maximum voltage generated is 12.3 m V,12.4m V,1.95 m V,respectively.The check results show that this device can be able to do energy harvest in three directions.