Research On The Micro/Nano Scanning System Based On PZT

On the basis of the researching on the AFM imaging principle and AFM atomic force mechanism, and according to the high efficiency and real-time requirements of AFM micro/nano operating system, a3D scanning control system using piezoelectric ceramic platform and stepping motors is designed in this paper. In this scanning control system we used one computer as the controller to control the movement of the PZT platform, through the programming of the VC++software to control the movement of the scanning platform in the micro/nano level, so as to realize real-time performance and high efficiency performance of nano operation. Then, the PZT scanning control platform is applied in the AFM system which also is one independent development of the laboratory, in the AFM system, through testing the variable of the cantilever, we can get the microstructure of the sample surface. In addition, in the process of debugging the AFM system, we found some questions such as PZT hysteresis characteristics can influence scan results, and the "obstacles" phenomenon. Then, in this paper, we make the further analysis and research on them, and also give the corresponding method for the next step, this is important for the optimization of the AFM system and research on it.The experimental results show that without lowering the imaging accuracy premise of the AFM system, scanning control under the PZT driver is realized. The combination system of optical microscope and atomic force microscope we designed for micro/namo hybrid operation can be widely used in biological research, micro-nano material analysis research and nano self-assembly process, etc.