Development Of Modular Scanning Probe Microscope Structure And Control Syste

Scanning probe microscope(SPM)is a general term for a microscope that obtains information by scanning the surface of a sample with a moving probe.SPM is a common analytical tool for studying nano-scale materials.Different types of scanning probe microscopes have different imaging principles,and different scanning probe microscopes are needed to study the characteristics of different samples.In addition,changing the sample is a delicate and time-consuming task for each type of microscope,and the time required to change the sample is further increased when the sample needs to be examined in high vacuum,low temperature,strong magnetic field,etc.Therefore,in order to reduce the time and cost of replacement,a modular scanning probe microscope is developed in this paper,which can realize the modular mirror body disassembly and combination.Scanning tunneling microscope(STM)and Atomic force microscope(AFM)switch scanning images are completed.This paper is mainly divided into three parts:(1)The overall mirror body of the modular scanning probe microscope was designed and fabricated in-house.Through the scanning probe microscope mirror body research,the use of Solidworks software design of inertial piezoelectric motor module,independent scanning head module,sample module three modular mirror body,and decided the ring pin for the three modules to connect and disassemble,to achieve modular combination design,this modular mirror body design is also the way to achieve STM,AFM switch scanning samples to achieve atomic-level resolution This modular mirror design is also the key to achieving atomic level resolution images for STM and AFM switchable scans.(2)Designed and developed the STM and AFM switching scanning program by myself.In this paper,Labview software is used to write the upper computer program of the control system.Through the characteristics of STM and AFM scanning control,the shared motor module program of two microscopes and the logic program development of switching scanning imaging module program are realized.(3)Experimental test of microscope imaging.The self-made scanning probe microscope body driving test,matching circuit,control system and upper computer control program,complete signal output and switch of two kinds of microscope scanning,realize sample image collection and storage.