Research On Error Analysis And Experiment For On-machine Measurement System Of Optical Sufrace

With the development of aviation, aerospace and defense industry, opticalsurface elements which have more freedom and can optimize the institution of systemhave been widely used. How to process high-quality optical surfaces and how toimprove the accuracy of measurement has important significance. On-machinemeasurement which is an important part of optical surface processing plays animportant role. On-machine measurement not only save the time of repeateddisassembly, but also effectively prevent the error due to repeated disassembly.By the way of the contact, on-machine measurement includes contactmeasurement and non-contact measurement. The environmental requirement ofcontact measurement is not sensitive and can achieve high accuracy. Non-contactmeasurement mostly is used for off-line measurement, and the result of measurementis sensitive to environment. So non-contact measurement is difficult to achievehigh-precision. In this paper, we built anon-machine measurement system platform,achieved the data collection of machine coordinate and optical surface, whichachieved the goal of on-machine measurement.The components of on-machine measurement system have been chosenaccording to the required precision. Rotationally symmetric aspheric surface as study,we built error mold using MATLAB software, analyzed and classified error sourcesduring measurement. For error separation and compensation according to building theinstallation tilt error model and the probe radius error model, the effects to themeasurement results are analyzed. We determined the best fitting method of measureddata based on the experiment.The single-point repeated accuracy and X-axis positioning repeated accuracy ofthe on-machine measurement are calibrated. Experiment has been made to studywhether the probe deflection angle affects the single-point repeated accuracy. Spherical component is used o to verify the accuracy and usefulness of on-machinemeasurement.