The Research Of Electron Source And Analyzer In Micro-mass Spectrometer

Mass spectrometer is one of the most important analytical instruments. In recent years, micro-mass spectrometer (MMS) is attentioned by researchers from many countries. Among the MMS components, study of ion source and mass analyzer is critical.Electron source is part of ion source, used for getting the sample gas ionized. Microstrip circuit is manufactured on the high frequency board, and argon microplasma electron source is got by microwave discharge, the exciting power is1W, the frequency is near2.45GHz. Then plasma emission spectrum is measured by fiber optic spectrometer, electron excitation temperature is0.21eV, calculated by the Boltzman slope method.The micro-electron source chip is designed, including plasma source and electron extraction, and manufactured by microfabrication technology. The glass microstrip discharge experiment is successful. So the chip circuit is reasonable and microdischarge is possible.Synchronous ion shielding mass analyzer is also researched in this thesis. SIMION8.0is used to simulate ion trajectories of different mass, through the micro-mass analyzer. At suitable signal parameters, the mass resolution is1u.