Analysis Of Micro Cantilever Switching Characteristics

Electrostatic force is a kind of very important driving method in MEMS, that has beenwidely used in micro swiches, micro forceps and micro mirror and other micro devices.Although there are some of MEMS products realized commercial production, but the theoryand tools in design can not meet the needs of industrial design. Repeated tests is still themain design method, that result in low efficiency of design, restricting the speed of productdevelopment and commercialization.The purpose of this paper is to discuss the anslysis ofmicro cantilever beam switches with ANSYS using the direct coupling method, to explorethe static, dynamic and stablilty characteristics of the micro switch. To prove the correctnessof the theoretical derivation according to the anslysis results.The research topics include thestatic anslysis of the micro cantilever beam switch under DC voltage and the static anddynamic analysis of it under AC voltage.The analysis with ANSYS involves modeling process, modal analysis, static analysis,dynamic analysis and stability analysis. The analysis is a static electricity-structure coupledphysics field analysis, because of the analysis involves the electrostatic force and structuraldeformation. To collect valid data and draw the relevant characteristic curve needed torepeating the process of analysis. Becase of the ANSYS analysis results is close to the actualresults, so it can be used to compared with theoretical results, in order to verify theoreticalderivation is correct or not. At the same time, the results of the analysis of micro cantileverbeam switch can help engineers to shorten the product design cycle and speed up the paceof its commercial promotion.